Invention Grant
- Patent Title: Methods and apparatus for controlling electrolyte flow for uniform plating
- Patent Title (中): 控制电解液流动均匀电镀的方法和装置
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Application No.: US09927740Application Date: 2001-08-10
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Publication No.: US06964792B1Publication Date: 2005-11-15
- Inventor: Steven T. Mayer , R. Marshall Stowell , Evan E. Patton , Seshasayee Varadarajan
- Applicant: Steven T. Mayer , R. Marshall Stowell , Evan E. Patton , Seshasayee Varadarajan
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Beyer, Weaver & Thomas, LLP.
- Main IPC: B05C3/00
- IPC: B05C3/00 ; B05D1/18 ; C25D5/00 ; C25D5/08 ; C25D7/12 ; C25D17/00

Abstract:
The present invention provides apparatus and methods for controlling flow dynamics of a plating fluid during a plating process. The invention achieves this fluid control through use of a diffuser membrane. Plating fluid is pumped through the membrane; the design and characteristics of the membrane provide a uniform flow pattern to the plating fluid exiting the membrane. Thus a work piece, upon which a metal or other conductive material is to be deposited, is exposed to a uniform flow of plating fluid.
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