Invention Grant
- Patent Title: Method of copper/copper surface bonding using a conducting polymer for application in IC chip bonding
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Application No.: US10988769Application Date: 2004-11-15
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Publication No.: US06967162B2Publication Date: 2005-11-22
- Inventor: Simon Chooi , Yakub Aliyu , Mei Sheng Zhou , John Sudijono , Subhash Gupta , Sudipto Roy , Paul Ho , Yi Xu
- Applicant: Simon Chooi , Yakub Aliyu , Mei Sheng Zhou , John Sudijono , Subhash Gupta , Sudipto Roy , Paul Ho , Yi Xu
- Applicant Address: SG Singapore
- Assignee: Chartered Semiconductor Manufacturing Ltd.
- Current Assignee: Chartered Semiconductor Manufacturing Ltd.
- Current Assignee Address: SG Singapore
- Agent George O. Saile; Rosemary L. S. Pike; Stephen G. Stanton
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/50 ; H01L21/60 ; H01L23/48 ; H01L23/485 ; H01L23/52 ; H01L29/40

Abstract:
A semiconductor chip having an exposed metal terminating pad thereover, and a separate substrate having a corresponding exposed metal bump thereover are provided. A conducting polymer plug is formed over the exposed metal terminating pad. A conforming interface layer is formed over the conducting polymer plug. The conducting polymer plug of the semiconductor chip is aligned with the corresponding metal bump. The conforming interface layer over the conducting polymer plug is mated with the corresponding metal bump. The conforming interface layer is thermally decomposed, adhering and permanently attaching the conducting polymer plug with the corresponding metal bump. Methods of forming and patterning a nickel carbonyl layer are also disclosed.
Public/Granted literature
- US20050090102A1 Method of copper/copper surface bonding using a conducting polymer for application in IC chip bonding Public/Granted day:2005-04-28
Information query
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