发明授权
- 专利标题： Apparatus for positioning an optical element in a structure
- 专利标题（中）： 用于将光学元件定位在结构中的装置
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申请号： US10458968申请日： 2003-06-11
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公开(公告)号： US06967792B2公开(公告)日： 2005-11-22
- 发明人: Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
- 申请人： Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT AG
- 当前专利权人： Carl Zeiss SMT AG
- 当前专利权人地址： DE Oberkochen
- 代理机构： Welsh & Katz, Ltd.
- 优先权： DE10226655 20020614
- 主分类号： G02B7/18
- IPC分类号： G02B7/18 ; G02B7/00 ; G03F7/20 ; H01L21/027 ; G02B7/02
摘要：
In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction.
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