发明授权
US06977411B2 Semiconductor device comprising transistors having control gates and floating gate electrodes
有权
包括具有控制栅极和浮置栅电极的晶体管的半导体器件
- 专利标题: Semiconductor device comprising transistors having control gates and floating gate electrodes
- 专利标题(中): 包括具有控制栅极和浮置栅电极的晶体管的半导体器件
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申请号: US10738025申请日: 2003-12-18
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公开(公告)号: US06977411B2公开(公告)日: 2005-12-20
- 发明人: Masaki Ito , Masaya Katayama , Takaaki Furuyama , Shozo Kawabata
- 申请人: Masaki Ito , Masaya Katayama , Takaaki Furuyama , Shozo Kawabata
- 申请人地址: JP Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JP Kawasaki
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 优先权: JP2002-369463 20021220
- 主分类号: H01L27/10
- IPC分类号: H01L27/10 ; H01L21/336 ; H01L21/8247 ; H01L27/115 ; H01L29/423 ; H01L29/788 ; H01L29/792 ; H01L29/76
摘要:
The semiconductor device comprises a first well 14 of a first conduction type formed in a semiconductor substrate 10; a second well 16 of a second conduction type formed in the first well 14; and a transistor 40 including a control gate 18 formed of an impurity region of the first conduction type formed in the second well 16, a first impurity diffused layer 26 and a second impurity diffused layer 33 formed with a channel region 25 therebetween, and a floating gate electrode 20 formed on the channel region 25 and the control gate 18 with a gate insulation film 24 therebetween. The control gate 18 is buried in the semiconductor substrate 10, which makes it unnecessary to form the control gate 18 on the floating gate electrode 20. Thus, the memory transistor and the other transistors, etc. can be formed by the same fabricating process. Thus, the fabrication processes can be less and the semiconductor device can be inexpensive.
公开/授权文献
- US20040129970A1 Semiconductor device and method for fabricating the same 公开/授权日:2004-07-08
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