发明授权
US06984844B2 Semiconductor device having heterojunction type MIS transistor which can operate at reduced voltage while maintaining high operation speed 有权
具有异质结型MIS晶体管的半导体器件可以在降低的电压下工作,同时保持较高的操作速度

Semiconductor device having heterojunction type MIS transistor which can operate at reduced voltage while maintaining high operation speed
摘要:
A semiconductor device according to the invention includes: a semiconductor layer (10–15); a gate insulator (16) provided on the semiconductor layer; a gate electrode (17) provided on the gate insulator; a source region (20a) and a drain region (20b), which are of a first conductivity type and are provided in the semiconductor layer on both sides of the gate electrode in plan view; a cap layer (25), a channel region (24), and an under-channel region (23,22), which are of a second conductivity type and are provided in the semiconductor layer between the source region and the drain region in a descending order from an interface with the gate insulator; and a bias electrode member (Vbs) for applying a voltage to the under-channel region, wherein the channel region is formed of a first semiconductor, the cap layer and the under-channel region are formed of a second semiconductor and a third semiconductor, respectively, each of which has a larger band gap than the first semiconductor, the bias electrode member is capable of applying the voltage independently of the gate electrode.
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