Invention Grant
US06985279B1 MEMS mirror with drive rotation amplification of mirror rotation angle
有权
MEMS镜与驱动旋转放大反光镜旋转角度
- Patent Title: MEMS mirror with drive rotation amplification of mirror rotation angle
- Patent Title (中): MEMS镜与驱动旋转放大反光镜旋转角度
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Application No.: US10910384Application Date: 2004-08-02
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Publication No.: US06985279B1Publication Date: 2006-01-10
- Inventor: Yee-Chung Fu
- Applicant: Yee-Chung Fu
- Applicant Address: US CA San Jose
- Assignee: Advanced Nano Systems, Inc.
- Current Assignee: Advanced Nano Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Patent Law Group LLP
- Agent David C. Hsia
- Main IPC: G02B7/182
- IPC: G02B7/182

Abstract:
A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to a rotating frame by a first torsional hinge along a rotational axis. The rotating frame has a body that defines a frame opening, and a group of rotational teeth extending from the body. A first bonding pad is located in the frame opening and coupled to the rotating frame by a second torsional hinge along the rotational axis. A second bonding pad is coupled to the rotating frame by a third torsional hinge along the rotational axis.
Public/Granted literature
- US20060023293A1 MEMS MIRROR WITH DRIVE ROTATION AMPLIFICATION OF MIRROR ROTATION ANGLE Public/Granted day:2006-02-02
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