Invention Grant
US06985279B1 MEMS mirror with drive rotation amplification of mirror rotation angle 有权
MEMS镜与驱动旋转放大反光镜旋转角度

MEMS mirror with drive rotation amplification of mirror rotation angle
Abstract:
A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to a rotating frame by a first torsional hinge along a rotational axis. The rotating frame has a body that defines a frame opening, and a group of rotational teeth extending from the body. A first bonding pad is located in the frame opening and coupled to the rotating frame by a second torsional hinge along the rotational axis. A second bonding pad is coupled to the rotating frame by a third torsional hinge along the rotational axis.
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