公开(公告)号：US20120085728A1

公开(公告)日：2012-04-12

申请号：US12924873

申请日：2010-10-07

申请人： Jun Chen ,  Guomin Mao ,  Tom Zhong ,  Wei Cao ,  Yee-Chung Fu ,  Chyu-Jiuh Torng

发明人： Jun Chen ,  Guomin Mao ,  Tom Zhong ,  Wei Cao ,  Yee-Chung Fu ,  Chyu-Jiuh Torng

IPC分类号： B81C1/00

CPC分类号： B81B3/0045 ,  B81B2201/042 ,  G02B26/0841

摘要： Two methods of fabricating a MEMS scanning mirror having a tunable resonance frequency are described. The resonance frequency of the mirror is set to a particular value by mass removal from the backside of the mirror during fabrication.

摘要翻译： 描述制造具有可调共振频率的MEMS扫描反射镜的两种方法。 反射镜的共振频率通过在制造期间从反射镜的背面质量去除而被设定为特定的值。

公开(公告)号：US07459093B1

公开(公告)日：2008-12-02

申请号：US11456562

申请日：2006-07-10

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： C23F1/00 ,  B44C1/22

CPC分类号： G02B26/0841

摘要： A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a silicon wafer to form a first support layer having asymmetric pads. The backside of the silicon wafer is etched to form a top layer with a mirror, beam structures extending from the mirror, and rotating comb teeth extending from the beam structures. Before or after the backside of the silicon wafer is etched, the topside of the silicon wafer is bonded to a glass wafer that forms a second support layer. Prior to bonding the silicon wafer to the glass wafer, the glass wafer may be etched to form a recess and/or a cavity that accommodates mobile elements in the silicon wafer. Due to the asymmetry of the pads in the first support layer below the rotating comb teeth in the top layer, oscillation can be initiated.

摘要翻译： 构造微电子机械系统（MEMS）装置的方法包括蚀刻硅晶片的顶面以形成具有不对称垫的第一支撑层。 蚀刻硅晶片的背面以形成具有反射镜的顶层，从反射镜延伸的束结构以及从梁结构延伸的旋转梳齿。 在蚀刻硅晶片的背面之前或之后，硅晶片的顶侧结合到形成第二支撑层的玻璃晶片上。 在将硅晶片接合到玻璃晶片之前，玻璃晶片可以被蚀刻以形成容纳硅晶片中的移动元件的凹部和/或空腔。 由于顶层中的旋转梳齿下方的第一支撑层中的焊盘的不对称性，可以启动振荡。

公开(公告)号：US07301689B2

公开(公告)日：2007-11-27

申请号：US11263795

申请日：2005-10-31

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) a first group of spring elements coupled to one half of the mirror, (3) a first beam coupled to the first group of spring elements, (4) a first spring coupled to the first beam, and (5) a first stationary pad coupled to the first spring. The device further includes (6) a second group of spring elements coupled in parallel to another half of the mirror, (7) a second beam coupled to the second group of spring elements, (8) a second spring coupled to the second beam, (9) and a second stationary pad coupled to the second spring. The device further includes a third beam that rigidly interconnects the first and the second beams so they rotate the mirror in unison.

摘要翻译： 微电子机械系统（MEMS）镜装置包括（1）反射镜，（2）耦合到反射镜的一半的第一组弹簧元件，（3）耦合到第一组弹簧元件的第一光束 ，（4）耦合到所述第一梁的第一弹簧，以及（5）联接到所述第一弹簧的第一固定垫。 该装置还包括（6）平行于反射镜的另一半耦合的第二组弹簧元件，（7）耦合到第二组弹簧元件的第二光束，（8）耦合到第二光束的第二弹簧， （9）和耦合到第二弹簧的第二固定垫。 该装置还包括第三梁，其将第一和第二梁刚性互连，使得它们一致地旋转反射镜。

公开(公告)号：US07252394B1

公开(公告)日：2007-08-07

申请号：US10723400

申请日：2004-03-10

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G03B21/14

CPC分类号： G03B21/28 ,  G02B26/101 ,  H04N9/3129 ,  Y10S362/812

摘要： A projection display system includes a light source emitting a light beam, and a reflecting mirror system for scanning the light beam over an image to illuminate the image. The light source can be solid state such as a laser diode. The reflecting mirror system can be one or more MEMS scanning mirrors that rotate to raster scan the light beam over the image. The image can be an advertisement located on a wall, a screen, a sign, or a billboard. The image can also be a semi-transparent image that is projected onto a medium to produce a larger image.

摘要翻译： 投影显示系统包括发射光束的光源和用于在图像上扫描光束以照亮图像的反射镜系统。 光源可以是诸如激光二极管的固态。 反射镜系统可以是一个或多个MEMS扫描镜，其旋转以光栅扫描图像上的光束。 图像可以是位于墙壁，屏幕，标牌或广告牌上的广告。 图像也可以是投影到介质上以产生更大图像的半透明图像。

公开(公告)号：US07046421B1

公开(公告)日：2006-05-16

申请号：US10778742

申请日：2004-02-13

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B26/00

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.

摘要翻译： 微电子机械系统（MEMS）装置包括具有沟槽的顶表面的反射镜，连接到反射镜的光束，连接到光束的旋转梳齿，以及将光束连接到接合焊盘的一个或多个弹簧。 镜子可以具有用于反射光的底面。 镜子可以包括顶部凸缘和由腹板连接的底部凸缘，其中顶部和底部凸缘分别形成顶部和底部表面。 旋转梳齿可具有锥形形状。 固定梳齿可以与旋转梳齿在平面内或平面外相互交错。 旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。

公开(公告)号：US07009755B2

公开(公告)日：2006-03-07

申请号：US11201672

申请日：2005-08-10

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B26/00 ,  G02B26/02

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of rotational teeth extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.

摘要翻译： 微机电系统（MEMS）镜装置包括通过沿旋转轴线的第一扭转铰链联接到致动器的反射镜。 致动器具有从主体延伸的主体和一组旋转齿。 锚固体通过沿着旋转轴线的第二扭转铰链联接致动器的另一端。

公开(公告)号：US06985279B1

公开(公告)日：2006-01-10

申请号：US10910384

申请日：2004-08-02

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B7/182

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to a rotating frame by a first torsional hinge along a rotational axis. The rotating frame has a body that defines a frame opening, and a group of rotational teeth extending from the body. A first bonding pad is located in the frame opening and coupled to the rotating frame by a second torsional hinge along the rotational axis. A second bonding pad is coupled to the rotating frame by a third torsional hinge along the rotational axis.

摘要翻译： 微机电系统（MEMS）镜装置包括通过第一扭转铰链沿着旋转轴线耦合到旋转框架的反射镜。 旋转框架具有限定框架开口的主体和从主体延伸的一组旋转齿。 第一接合垫位于框架开口中，并通过沿着旋转轴线的第二扭转铰链与旋转框架连接。 第二接合焊盘通过沿着旋转轴线的第三扭转铰链联接到旋转框架。

公开(公告)号：US20050045727A1

公开(公告)日：2005-03-03

申请号：US10683962

申请日：2003-10-10

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B26/08 ,  G06K7/10 ,  G02B26/00 ,  G06K7/14

CPC分类号： G06K7/10653 ,  G02B26/0841

摘要： A MEMS scanning mirror device includes a scanning mirror, rotational comb teeth, stationary comb teeth, distributed serpentine springs, and anchors. The scanning mirror and the rotational comb teeth are driven by electrostatic force from stationary in-plane and/or out-of-plane teeth. The mirror is attached to the rotational comb structure by multiple support attachments. Multiple serpentine springs serve as the flexible hinges that link the movable structure to the stationary support structure.

摘要翻译： MEMS扫描镜装置包括扫描镜，旋转梳齿，固定梳齿，分布蛇形弹簧和锚。 扫描镜和旋转梳齿由固定的平面内和/或平面外的齿的静电力驱动。 镜子通过多个支撑附件附接到旋转梳结构。 多个蛇形弹簧用作将可移动结构连接到固定支撑结构的柔性铰链。

公开(公告)号：US08741692B1

公开(公告)日：2014-06-03

申请号：US13233979

申请日：2011-09-15

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： H01L21/00

CPC分类号： B81C1/00301 ,  B81B2201/0271 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2207/096 ,  B81C2203/0118

摘要： A method for forming semiconductor devices with wafer-level packaging (WLP) includes providing a silicon-on-insulator (SOI) substrate, forming a mask on a silicon layer of the SOI substrate, etching the silicon layer through openings in the mask to form elements initially bonded to but later released from an insulator layer of the SOI substrate, bonding a support substrate to the silicon layer, depositing metal over through holes in the support substrate to contact the silicon layer, and singulating the semiconductor devices from the bonded SOI substrate and the support substrate. The support substrate defines depressions opposite the elements so the elements are not bonded to the support substrate. Each semiconductor device includes a hermetically sealed package having a portion of the SOI substrate and a portion of the support substrate.

摘要翻译： 用于形成具有晶片级封装（WLP）的半导体器件的方法包括提供绝缘体上硅（SOI）衬底，在SOI衬底的硅层上形成掩模，通过掩模中的开口蚀刻硅层以形成 元件最初被结合到SOI衬底的绝缘体层上，然后从SOI衬底的绝缘体层释放，将支撑衬底粘合到硅层上，在支撑衬底中的通孔上沉积金属以接触硅层，以及从结合的SOI衬底分离半导体器件 和支撑基板。 支撑衬底限定与元件相对的凹陷，因此元件不与支撑衬底结合。 每个半导体器件包括具有SOI衬底的一部分和支撑衬底的一部分的气密密封封装。

公开(公告)号：US08383256B1

公开(公告)日：2013-02-26

申请号：US12613774

申请日：2009-11-06

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： H01M2/12

CPC分类号： H01M2/1241 ,  F16K99/0001 ,  H01M2/345 ,  H01M2200/20

摘要： A battery has a battery case with a hole, and a micro-electro-mechanical system (MEMS) safety valve mounted to the battery case over the hole. The MEMS safety valve includes a silicon diaphragm and a silicon electrode layer with a movable electrode mounted above the diaphragm, a stationary electrode around the movable electrode, and one or more links electrically connecting the movable and the stationary electrodes. The stationary electrode, the links, and the movable electrode form part of an electrical path between one or more battery cells and a battery terminal. The links break to open the electrical path when the pressure in the battery case pushes the diaphragm and the links past a first limit. The diaphragm breaks to release fluid from the battery case when the pressure pushes the diaphragm past a second limit. The first limit may be smaller, larger, or the same as the second limit.

摘要翻译： 电池具有带孔的电池壳体，以及安装在电池壳体上的微机电系统（MEMS）安全阀。 MEMS安全阀包括硅隔膜和安装在隔膜上方的可移动电极的硅电极层，围绕可动电极的固定电极以及电连接可动电极和固定电极的一个或多个连接件。 固定电极，连杆和可动电极构成一个或多个电池单元与电池端子之间的电气路径的一部分。 当电池盒中的压力推动隔膜并且连接件超过第一限制时，连杆断开以打开电路径。 当压力推动隔膜超过第二极限时，隔膜破裂以从电池盒释放流体。 第一个限制可能更小，更大或与第二个限制相同。