发明授权
US06987048B1 Memory device having silicided bitlines and method of forming the same 有权
具有硅化位线的存储器件及其形成方法

Memory device having silicided bitlines and method of forming the same
摘要:
A memory device and a method of fabrication are provided. The memory device includes a semiconductor substrate, a bottom dielectric, a charge storing layer, and a top dielectric in a stacked gate configuration. Silicided buried bitlines, which function as a source and a drain, are formed within the substrate. The silicided bitlines have a reduced resistance, which greatly reduces the number of bitline contacts necessary in an array of memory devices.
信息查询
0/0