发明授权
US06987048B1 Memory device having silicided bitlines and method of forming the same
有权
具有硅化位线的存储器件及其形成方法
- 专利标题: Memory device having silicided bitlines and method of forming the same
- 专利标题(中): 具有硅化位线的存储器件及其形成方法
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申请号: US10635781申请日: 2003-08-06
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公开(公告)号: US06987048B1公开(公告)日: 2006-01-17
- 发明人: Ning Cheng , Hiroyuki Kinoshita , Jeff P. Erhardt , Mark T. Ramsbey , Cyrus Tabery , Jean Yee-Mei Yang
- 申请人: Ning Cheng , Hiroyuki Kinoshita , Jeff P. Erhardt , Mark T. Ramsbey , Cyrus Tabery , Jean Yee-Mei Yang
- 申请人地址: US CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Renner, Otto, Boisselle & Sklar, LLP
- 主分类号: H01L21/8247
- IPC分类号: H01L21/8247
摘要:
A memory device and a method of fabrication are provided. The memory device includes a semiconductor substrate, a bottom dielectric, a charge storing layer, and a top dielectric in a stacked gate configuration. Silicided buried bitlines, which function as a source and a drain, are formed within the substrate. The silicided bitlines have a reduced resistance, which greatly reduces the number of bitline contacts necessary in an array of memory devices.
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