Invention Grant
US06987308B2 Ferroelectric capacitors with metal oxide for inhibiting fatigue
失效
具有金属氧化物的铁电电容器用于抑制疲劳
- Patent Title: Ferroelectric capacitors with metal oxide for inhibiting fatigue
- Patent Title (中): 具有金属氧化物的铁电电容器用于抑制疲劳
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Application No.: US11009809Application Date: 2004-12-10
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Publication No.: US06987308B2Publication Date: 2006-01-17
- Inventor: Moon-sook Lee , Kun-sang Park
- Applicant: Moon-sook Lee , Kun-sang Park
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2002-0035929 20020626
- Main IPC: H01L29/72
- IPC: H01L29/72
Abstract:
A method of forming a ferroelectric capacitor includes forming a lower electrode on a substrate. The lower electrode is oxidized to form a metal oxide film. A ferroelectric film is formed on the metal oxide film while reduction of the oxygen content of the metal oxide film is inhibited. An upper electrode is formed on the ferroelectric film.
Public/Granted literature
- US20050106761A1 Ferroelectric capacitors with metal oxide for inhibiting fatigue Public/Granted day:2005-05-19
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