发明授权
- 专利标题: Stacked piezoelectric device
- 专利标题(中): 堆叠压电器件
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申请号: US10776332申请日: 2004-02-12
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公开(公告)号: US06989627B2公开(公告)日: 2006-01-24
- 发明人: Takeshi Senoo , Nozomu Okumura , Yasuhiro Suzuki , Isao Mizuno , Akira Fujii
- 申请人: Takeshi Senoo , Nozomu Okumura , Yasuhiro Suzuki , Isao Mizuno , Akira Fujii
- 申请人地址: JP Kariya
- 专利权人: Denso Corporation
- 当前专利权人: Denso Corporation
- 当前专利权人地址: JP Kariya
- 代理机构: Nixon & Vanderhye P.C.
- 优先权: JP2003-034172 20030212; JP2004-004475 20040109
- 主分类号: H01L41/08
- IPC分类号: H01L41/08
摘要:
A stacked piezoelectric device, which is inexpensive and excellent in electric transmission efficiency and little deterioration of strength of an internal electrode layer, is provided by having an internal electrode layer containing not less than 50 percent by weight of Cu element, and not more than 5 percent of a pore occurrence expressed by (B/A)×100 (%) wherein A is an area of an interface between the internal electrode layer and the piezoelectric layer and B is a sum of areas of pores which appear in the interface and have a diameter of not less than 0.1 micrometers. Preferably, a surface roughness Ra of the interface of the piezoelectric layer contacting the internal electrode layer is not more than 0.5 C (μm) wherein C is a thickness of the internal electrode layer in micrometers. The piezoelectric material constituting the piezoelectric layer preferably comprises PZT which is a Pb(Zr,Ti)O3-based oxide having a perovskite structure.
公开/授权文献
- US20040169442A1 Stacked piezoelectric device 公开/授权日:2004-09-02