发明授权
- 专利标题: Method, system, and apparatus for management of reaction loads in a lithography system
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申请号: US11110903申请日: 2005-04-21
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公开(公告)号: US06989889B2公开(公告)日: 2006-01-24
- 发明人: Daniel N. Galburt
- 申请人: Daniel N. Galburt
- 申请人地址: NL Veldhoven
- 专利权人: ASML Holding N.V.
- 当前专利权人: ASML Holding N.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 主分类号: G03B27/58
- IPC分类号: G03B27/58 ; G03B27/42 ; G03B27/62
摘要:
A method, system, and apparatus for management of reaction loads in a lithography system is described. An isolated structure is supported by a non-isolated structure. The isolated structure supports a moveable stage. A linear motor includes a first linear motor element and a second linear motor element. The first linear motor element is coupled to the moveable stage. A plurality of parallel flexure plates mount the second linear motor element on the isolated structure. A flexure rod is coupled between the non-isolated structure and the second linear motor element.
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