发明授权
- 专利标题: Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
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申请号: US09939422申请日: 2001-08-24
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公开(公告)号: US06989921B2公开(公告)日: 2006-01-24
- 发明人: Jonathan Bernstein , William P. Taylor , Gregory A. Kirkos , Marc Waelti
- 申请人: Jonathan Bernstein , William P. Taylor , Gregory A. Kirkos , Marc Waelti
- 申请人地址: US NY Corning
- 专利权人: Corning Incorporated
- 当前专利权人: Corning Incorporated
- 当前专利权人地址: US NY Corning
- 代理机构: Wilmer Cutler Pickering Hale and Dorr LLP
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.