发明授权
US06993973B2 Contaminant deposition control baffle for a capacitive pressure transducer
有权
用于电容式压力传感器的污染物沉积控制挡板
- 专利标题: Contaminant deposition control baffle for a capacitive pressure transducer
- 专利标题(中): 用于电容式压力传感器的污染物沉积控制挡板
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申请号: US10440391申请日: 2003-05-16
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公开(公告)号: US06993973B2公开(公告)日: 2006-02-07
- 发明人: D. Jeffrey Lischer , Robert Traverso
- 申请人: D. Jeffrey Lischer , Robert Traverso
- 申请人地址: US MA Andover
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Andover
- 代理机构: Wilmer Cutler Pickering Hale and Dorr LLP
- 主分类号: G01L9/12
- IPC分类号: G01L9/12
摘要:
The disclosed transducer includes a housing, a diaphragm, an inner conductor, an outer conductor, and a first baffle. The housing defines an interior volume. The diaphragm is disposed in the housing and divides the interior volume into a first chamber and a second chamber. The diaphragm flexes in response to pressure differentials in the first and second chambers. The inner conductor is disposed in the first chamber. The outer conductor is disposed in the first chamber around the inner conductor. The first baffle is disposed in the second chamber and defines an inner region, a middle region, and an outer region. The inner region underlies the inner conductor. The middle region underlies the outer conductor. The outer region underlies neither the inner conductor nor the outer conductor. The first baffle defines apertures in at least two of the inner, middle, and outer regions.
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