发明授权
- 专利标题： Surface acoustic wave (SAW) device
- 专利标题（中）： 表面声波（SAW）装置
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申请号： US10240426申请日： 2002-01-24
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公开(公告)号： US06998687B2公开(公告)日： 2006-02-14
- 发明人: Takashi Inoue , Satoshi Matsuo , Akihiko Namba
- 申请人： Takashi Inoue , Satoshi Matsuo , Akihiko Namba
- 申请人地址： JP Osaka
- 专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址： JP Osaka
- 代理机构： RatnerPrestia
- 国际申请： PCT/JP02/00498 WO 20020124
- 国际公布： WO02/061943 WO 20020808
- 主分类号： H01L27/14
- IPC分类号： H01L27/14
摘要：
A surface acoustic wave (SAW) device having improved moisture resistance is provided. The device includes a piezoelectric substrate, an interdigital transducer (IDT) electrode on a first surface of the piezoelectric substrate, and a resin coating for covering the IDT electrode. After a piece of resin material of the resin coating is dipped in an amount of pure water as solvent having a mass as 10 times great as the piece of resin material at 120° C. under 2 atom pressure for twenty hours, a concentration of chlorine ion in the solvent is not higher than 50 ppm.
公开/授权文献
- US20030164529A1 Saw device and method for manufacture thereof 公开/授权日：2003-09-04
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