Invention Grant
US06999897B2 Method and related system for semiconductor equipment early warning management 失效
半导体设备预警管理方法及相关系统

Method and related system for semiconductor equipment early warning management
Abstract:
A method and related system for semiconductor equipment early warning management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording the quality of semiconductor products and corresponding testing parameters, and analyzing a relationship between the corresponding process parameters, the corresponding equipment parameters, and the quality of semiconductor products of each piece of equipment.
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