Invention Grant
- Patent Title: Method and related system for semiconductor equipment early warning management
- Patent Title (中): 半导体设备预警管理方法及相关系统
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Application No.: US10708573Application Date: 2004-03-11
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Publication No.: US06999897B2Publication Date: 2006-02-14
- Inventor: Hung-En Tai , Chien-Chung Chen , Haw-Jyue Luo , Sheng-Jen Wang
- Applicant: Hung-En Tai , Chien-Chung Chen , Haw-Jyue Luo , Sheng-Jen Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Powerchip Semiconductor Corp.
- Current Assignee: Powerchip Semiconductor Corp.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Main IPC: G11C7/00
- IPC: G11C7/00

Abstract:
A method and related system for semiconductor equipment early warning management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording the quality of semiconductor products and corresponding testing parameters, and analyzing a relationship between the corresponding process parameters, the corresponding equipment parameters, and the quality of semiconductor products of each piece of equipment.
Public/Granted literature
- US20050203715A1 METHOD AND RELATED SYSTEM FOR SEMICONDUCTOR EQUIPMENT EARLY WARNING MANAGEMENT Public/Granted day:2005-09-15
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