Invention Grant
- Patent Title: Flexural plate wave sensor and array
- Patent Title (中): 弯曲板波传感器和阵列
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Application No.: US10844278Application Date: 2004-05-12
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Publication No.: US07000453B2Publication Date: 2006-02-21
- Inventor: Brian T. Cunningham , John R. Williams
- Applicant: Brian T. Cunningham , John R. Williams
- Applicant Address: US MA Cambridge
- Assignee: The Charles Stark Draper Laboratory, Inc.
- Current Assignee: The Charles Stark Draper Laboratory, Inc.
- Current Assignee Address: US MA Cambridge
- Agency: Iandiorio & Teska
- Main IPC: G01N29/02
- IPC: G01N29/02

Abstract:
A flexural plate wave sensor array includes a substrate, and a plurality of flexural plate wave sensors, each sensor including a cavity formed in the substrate, a thin film membrane layer spanning the cavity, a piezoelectric layer disposed on the thin film membrane layer, a transducer disposed on the piezoelectric layer and an absorptive coating disposed on said thin film membrane layer within the cavity. The cavity of each of the sensors includes interior walls which are substantially parallel to each other and to the interior walls of adjacent sensors.
Public/Granted literature
- US20050160821A1 Flexural plate wave sensor and array Public/Granted day:2005-07-28
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