- 专利标题: Fully isolated dielectric memory cell structure for a dual bit nitride storage device and process for making same
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申请号: US10997345申请日: 2004-11-24
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公开(公告)号: US07001807B1公开(公告)日: 2006-02-21
- 发明人: Wei Zheng , Mark W. Randolph , Nicholas H. Tripsas , Zoran Krivokapic , Jack F. Thomas , Mark T. Ramsbey
- 申请人: Wei Zheng , Mark W. Randolph , Nicholas H. Tripsas , Zoran Krivokapic , Jack F. Thomas , Mark T. Ramsbey
- 申请人地址: US CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Renner, Otto, Boiselle & Sklar, LLP
- 主分类号: H01L21/31
- IPC分类号: H01L21/31
摘要:
A method of fabricating a dual bit dielectric memory cell structure on a silicon substrate includes implanting buried bit lines within the substrate and fabricating a layered island on the surface of the substrate between the buried bit lines. The island has a perimeter defining a gate region, and comprises a tunnel dielectric layer on the surface of the silicon on insulator wafer, an isolation barrier dielectric layer on the surface of the tunnel dielectric layer, a top dielectric layer on the surface of the isolation barrier dielectric layer, and a polysilicon gate on the surface of the top dielectric layer. A portion of the isolation barrier dielectric layer is removed to form an undercut region within the gate region and a charge trapping material is deposited within the undercut region.
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