Invention Grant
- Patent Title: Dense plasma focus radiation source
- Patent Title (中): 密集等离子体聚焦辐射源
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Application No.: US10442544Application Date: 2003-05-21
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Publication No.: US07002168B2Publication Date: 2006-02-21
- Inventor: Jonah Jacob , Joseph A. Mangano , James Moran , Alexander Bykanov , Rodney Petr , Mordechai Rokni
- Applicant: Jonah Jacob , Joseph A. Mangano , James Moran , Alexander Bykanov , Rodney Petr , Mordechai Rokni
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agent William Cray
- Main IPC: H01J35/00
- IPC: H01J35/00

Abstract:
A dense plasma focus radiation source for generating EUV radiation using Lithium vapor and including a coaxially disposed anode and cathode. The invention includes methods and apparatuses for enhancing the efficiency of EUV radiation production, for protecting, cooling and extending the life of the anode and cathode, for protecting and shielding collecting optics from debris and pressure disturbances in the discharge chamber, and for feeding Lithium into the discharge chamber.
Public/Granted literature
- US20040071267A1 Dense plasma focus radiation source Public/Granted day:2004-04-15
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