Invention Grant
- Patent Title: Ferroelectric capacitor and method of manufacturing the same
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Application No.: US10270521Application Date: 2002-10-16
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Publication No.: US07002193B2Publication Date: 2006-02-21
- Inventor: June-key Lee , Young-soo Park
- Applicant: June-key Lee , Young-soo Park
- Applicant Address: KR Suwon
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon
- Agency: Lee & Morse, P.C.
- Priority: KR2001-0069986 20011110; KR2001-0058765 20020927
- Main IPC: H01L29/72
- IPC: H01L29/72

Abstract:
A ferroelectric capacitor and a method of manufacturing the same are provided, wherein the ferroelectric capacitor of a semiconductor device, which sequentially includes a lower electrode, a ferroelectric layer, and an upper electrode on a conductive layer connected to a transistor formed on a semiconductor substrate, includes an oxidation preventing layer between the conductive layer and the lower electrode. The oxidation preventing layer prevents the conductive layer from being oxidized during high-temperature heat treatment of the ferroelectric layer. Accordingly, the oxidation resistivity of the interfaces of the conductive layer, used as a storage node, and the lower electrode, which faces the conductive layer, increases, so a temperature at which a ferroelectric thin layer is formed can be also increased. Consequently, a ferroelectric thin layer having excellent characteristics may be obtained.
Public/Granted literature
- US20030089934A1 Ferroelectric capacitor and method of manufacturing the same Public/Granted day:2003-05-15
Information query
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