- 专利标题: Semiconductor processing apparatus having lift and tilt mechanism
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申请号: US10721057申请日: 2003-11-24
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公开(公告)号: US07002698B2公开(公告)日: 2006-02-21
- 发明人: Kyle Hanson , Mark Dix , Vlad Zila , Daniel J. Woodruff
- 申请人: Kyle Hanson , Mark Dix , Vlad Zila , Daniel J. Woodruff
- 申请人地址: US MT Kalispell
- 专利权人: Semitool, Inc.
- 当前专利权人: Semitool, Inc.
- 当前专利权人地址: US MT Kalispell
- 代理机构: Perkins Coie LLP
- 主分类号: G01B11/14
- IPC分类号: G01B11/14
摘要:
A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear way comprising a fixed frame and a moveable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the moveable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.
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