Invention Grant
US07005656B1 Ion implanter with vacuum-maintaining circuit board providing connections to internal faraday cups
有权
离子注入机与真空维护电路板提供连接到内部法拉第杯
- Patent Title: Ion implanter with vacuum-maintaining circuit board providing connections to internal faraday cups
- Patent Title (中): 离子注入机与真空维护电路板提供连接到内部法拉第杯
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Application No.: US11048420Application Date: 2005-02-01
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Publication No.: US07005656B1Publication Date: 2006-02-28
- Inventor: Rajen Sud , Michael Fiorito , Thomas Schaefer
- Applicant: Rajen Sud , Michael Fiorito , Thomas Schaefer
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/04
- IPC: H01J37/04

Abstract:
An ion implanter has an elongated evacuated chamber having a distal end along the path of travel of an ion beam. A planar multilayer printed circuit board (PCB) is located at the distal end of the chamber. The PCB has a first portion sealingly covering the distal end of the chamber and a second portion that extends outside the evacuated chamber, for example in the upward direction. An array of Faraday cups are arranged on a proximal surface of the first portion of the PCB within the chamber, and one or more multi-contact connectors (such as D-type connectors) are located on the second portion of the PCB outside the chamber. The individual contacts of the connector(s) are connected to respective Faraday cups by circuit traces of the PCB.
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