Invention Grant
- Patent Title: Circuit and method for impedance detection
- Patent Title (中): 电路和阻抗检测方法
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Application No.: US10488679Application Date: 2002-09-06
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Publication No.: US07005865B2Publication Date: 2006-02-28
- Inventor: Masami Yakabe , Naoki Ikeuchi
- Applicant: Masami Yakabe , Naoki Ikeuchi
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2001-270877 20010906
- International Application: PCT/JP02/09137 WO 20020906
- International Announcement: WO03/023420 WO 20030320
- Main IPC: G01R27/26
- IPC: G01R27/26
Abstract:
An electrostatic capacitance detection circuit 10 comprises a DC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential, an impedance converter 16, a resistance (R1) 12 connected between the DC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and a capacitor 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16. A capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and specific potential.
Public/Granted literature
- US20050035771A1 Impedance measuring circuit, it's method, and capacitance measuring circuit Public/Granted day:2005-02-17
Information query
