- 专利标题: Optical switching system
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申请号: US10136684申请日: 2002-04-30
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公开(公告)号: US07006720B2公开(公告)日: 2006-02-28
- 发明人: John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
- 申请人: John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
- 申请人地址: US CT Stamford
- 专利权人: Xerox Corporation
- 当前专利权人: Xerox Corporation
- 当前专利权人地址: US CT Stamford
- 代理商 Kent Chen
- 主分类号: G02B6/26
- IPC分类号: G02B6/26 ; G02B6/42
摘要:
A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.
公开/授权文献
- US20030202738A1 Optical switching system 公开/授权日:2003-10-30
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