发明授权
- 专利标题： Methods and systems for determining a property of an insulating film
- 专利标题（中）： 用于确定绝缘膜性能的方法和系统
-
申请号： US10616086申请日： 2003-07-09
-
公开(公告)号： US07012438B1公开(公告)日： 2006-03-14
- 发明人: Thomas G. Miller , Gregory S. Horner , Amin Samsavar , Zhiwei Xu , Patrick Stevens
- 申请人： Thomas G. Miller , Gregory S. Horner , Amin Samsavar , Zhiwei Xu , Patrick Stevens
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Technologies Corp.
- 当前专利权人： KLA-Tencor Technologies Corp.
- 当前专利权人地址： US CA Milpitas
- 代理机构： Daffer McDaniel, LLP
- 代理商 Ann Marie Mewherter
- 主分类号： G01R27/08
- IPC分类号： G01R27/08 ; G01R27/26 ; G01N27/60
摘要：
A method for determining a property of an insulating film is provided. The method may include obtaining a charge density measurement of the film, a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and a rate of voltage decay of the film. The method may also include determining the property of the film using the charge density, the surface voltage potential, and the rate of voltage decay. A method for determining a thickness of an insulating film is provided. The method may include depositing a charge on the film, measuring a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and measuring a rate of voltage decay of the film. The method may also include determining a thickness of the film using the rate of voltage decay and a theoretical model relating to leakage and film thickness.
信息查询
