Invention Grant
- Patent Title: Tunable-wavelength optical filter and method of manufacturing the same
- Patent Title (中): 可调谐波长光学滤波器及其制造方法
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Application No.: US11045554Application Date: 2005-01-27
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Publication No.: US07012752B2Publication Date: 2006-03-14
- Inventor: Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
- Applicant: Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
- Applicant Address: KR
- Assignee: Electronics and Telecommunications Research Institue
- Current Assignee: Electronics and Telecommunications Research Institue
- Current Assignee Address: KR
- Agency: Blakely Sokoloff Taylor & Zafman
- Priority: KR2002-78443 20021210
- Main IPC: G02B27/00
- IPC: G02B27/00

Abstract:
An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.
Public/Granted literature
- US20050157392A1 Tunable-wavelength optical filter and method of manufacturing the same Public/Granted day:2005-07-21
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