Invention Grant
US07014115B2 MEMS scanning mirror with distributed hinges and multiple support attachments
有权
具有分布式铰链和多个支撑附件的MEMS扫描镜
- Patent Title: MEMS scanning mirror with distributed hinges and multiple support attachments
- Patent Title (中): 具有分布式铰链和多个支撑附件的MEMS扫描镜
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Application No.: US10683962Application Date: 2003-10-10
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Publication No.: US07014115B2Publication Date: 2006-03-21
- Inventor: Yee-Chung Fu
- Applicant: Yee-Chung Fu
- Applicant Address: US CA Fremont
- Assignee: Advanced Nano Systems, Inc.
- Current Assignee: Advanced Nano Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Patent Law Group LLP
- Agent David C. Hsia
- Main IPC: G06K7/10
- IPC: G06K7/10
Abstract:
A MEMS scanning mirror device includes a scanning mirror, rotational comb teeth, stationary comb teeth, distributed serpentine springs, and anchors. The scanning mirror and the rotational comb teeth are driven by electrostatic force from stationary in-plane and/or out-of-plane teeth. The mirror is attached to the rotational comb structure by multiple support attachments. Multiple serpentine springs serve as the flexible hinges that link the movable structure to the stationary support structure.
Public/Granted literature
- US20050045727A1 MEMS scanning mirror with distributed hinges and multiple support attachments Public/Granted day:2005-03-03
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