发明授权
- 专利标题: Infrared ray detecting type imaging device
- 专利标题(中): 红外线检测型成像装置
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申请号: US11063545申请日: 2005-02-24
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公开(公告)号: US07015472B2公开(公告)日: 2006-03-21
- 发明人: Sumio Ikegawa , Kohei Nakayama , Hideyuki Funaki , Yoshinori Iida , Keitaro Shigenaka
- 申请人: Sumio Ikegawa , Kohei Nakayama , Hideyuki Funaki , Yoshinori Iida , Keitaro Shigenaka
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权: JP2002-081795 20020322
- 主分类号: H01L31/062
- IPC分类号: H01L31/062 ; H01L31/113 ; H01L31/058
摘要:
An imaging device comprises a select line, a first signal line crossing the select line, and a first pixel provided at a portion corresponding to a crossing portion of the select line and the first signal line, the first pixel comprising a first buffer layer formed on a substrate, a first bolometer film formed on the first buffer layer, made of a compound which undergoes metal-insulator transition, and generating a first temperature detection signal, a first switching element formed on the substrate, selected by a select signal from the select line, and supplying the first temperature detection signal to the first signal line, and a metal wiring connecting a top surface of the first bolometer film to the first switching element.
公开/授权文献
- US20050139774A1 Infrared ray detecting type imaging device 公开/授权日:2005-06-30
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