发明授权
- 专利标题： Method and apparatus for generation of fine particles
- 专利标题（中）： 用于产生细颗粒的方法和装置
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申请号： US10651153申请日： 2003-08-28
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公开(公告)号： US07022244B2公开(公告)日： 2006-04-04
- 发明人: Atusi Sakaida , Toshihisa Taniguchi , Hiroshi Tanaka
- 申请人： Atusi Sakaida , Toshihisa Taniguchi , Hiroshi Tanaka
- 申请人地址： JP Kariya
- 专利权人： DENSO Corporation
- 当前专利权人： DENSO Corporation
- 当前专利权人地址： JP Kariya
- 代理机构： Harness, Dickey & Pierce, PLC
- 优先权： JP2002-255187 20020830
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; B01D47/06
摘要：
To supply microfine liquid droplets to a microscopic space for enabling micromachining and provide a method and an apparatus for forming the microfine liquid droplets, there is provided a method and an apparatus for generating liquid fine particles, comprising atomizing a liquid, fractionating the atomized liquid particles to form microfine liquid droplets by inertial fractionation and contacting the microfine liquid droplets with a heated carrier gas, thereby thermally drying the liquid particles to form finer particles.
公开/授权文献
- US20040042969A1 Method and apparatus for generation of fine particles 公开/授权日：2004-03-04
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