Invention Grant
US07022458B2 Photoresist polymer and photoresist composition containing the same 有权
光致抗蚀剂聚合物和含有它的光致抗蚀剂组合物

Photoresist polymer and photoresist composition containing the same
Abstract:
Photoresist polymers and photoresist compositions are disclosed. A photoresist polymer represented by Formula 1 and a photoresist composition containing the same have excellent etching resistance, thermal resistance and adhesive property, and high affinity to an developing solution, thereby improving LER (line edge roughness). wherein X1, X2, X3, R1, R2, R3, R4, R5, m, n, o, a, b, c, d and e are as defined in the description.
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