发明授权
- 专利标题： Impedance measuring circuit and capacitance measuring circuit
- 专利标题（中）： 阻抗测量电路和电容测量电路
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申请号： US10488680申请日： 2002-09-06
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公开(公告)号： US07023223B2公开(公告)日： 2006-04-04
- 发明人: Masami Yakabe , Naoki Ikeuchi , Toshiyuki Matsumoto , Koichi Nakano
- 申请人： Masami Yakabe , Naoki Ikeuchi , Toshiyuki Matsumoto , Koichi Nakano
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权： JP2001-269991 20010906
- 国际申请： PCT/JP02/09136 WO 20020906
- 国际公布： WO03/023419 WO 20030320
- 主分类号： G01R27/26
- IPC分类号： G01R27/26
摘要：
An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), an impedance converter 16, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and an impedance element (a capacitor) 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16. A capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and the specific potential.
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