发明授权
US07023557B2 Parallel interferometric measurements using an expanded local oscillator signal
有权
使用扩展的本地振荡器信号的并行干涉测量
- 专利标题: Parallel interferometric measurements using an expanded local oscillator signal
- 专利标题(中): 使用扩展的本地振荡器信号的并行干涉测量
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申请号: US10634358申请日: 2003-08-05
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公开(公告)号: US07023557B2公开(公告)日: 2006-04-04
- 发明人: Gregory D. VanWiggeren , Douglas M. Baney
- 申请人: Gregory D. VanWiggeren , Douglas M. Baney
- 申请人地址: US CA Palo Alto
- 专利权人: Agilent Technologies, Inc.
- 当前专利权人: Agilent Technologies, Inc.
- 当前专利权人地址: US CA Palo Alto
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01N21/00
摘要:
A system for characterizing optical properties of a device under test (DUT) uses an expanded local oscillator signal to perform multiple parallel interferometric measurements. In one system, the expanded local oscillator signal is optically connected to a lens array. The lens array focuses the expanded swept local oscillator signal into multiple beams. The multiple beams are then used in multiple parallel interferometric measurements. The multiple beams may be used as the reference beams or applied to the DUT and used as the test beams depending on the application. The test beams and reference beams are combined to perform the interferometric measurements. In another system, a portion of the expanded local oscillator signal is applied directly to a DUT as the test beam while another portion of the expanded local oscillator signal is used for the reference beam.