发明授权
- 专利标题： Assembly and method for generating a hydrodynamic air bearing
- 专利标题（中）： 用于产生流体动力空气轴承的装配和方法
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申请号： US10641914申请日： 2003-08-15
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公开(公告)号： US07025660B2公开(公告)日： 2006-04-11
- 发明人: Travis R. Taylor , Carsten Mehring
- 申请人： Travis R. Taylor , Carsten Mehring
- 申请人地址： US CA Fremont
- 专利权人： Lam Research Corporation
- 当前专利权人： Lam Research Corporation
- 当前专利权人地址： US CA Fremont
- 代理机构： Brinks Hofer Gilson & Lione
- 主分类号： B24B7/19
- IPC分类号： B24B7/19
摘要：
A method and assembly for generating a hydrodynamic air bearing is described, wherein at least one rotor is rotated to force air through channels defined in a platen located adjacent to a linear belt and the forced air is directed to the linear belt. The method includes rotating at least one rotor with a motor such that the rotor forces air through channels defined in a platen, and the air is directed toward a linear belt. The assembly includes a housing in which a platen, rotors, and a bearing plate are located.
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