Invention Grant
US07025892B1 Method for creating gated filament structures for field emission displays
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用于产生用于场发射显示器的门控灯丝结构的方法
- Patent Title: Method for creating gated filament structures for field emission displays
- Patent Title (中): 用于产生用于场发射显示器的门控灯丝结构的方法
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Application No.: US08383409Application Date: 1995-01-31
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Publication No.: US07025892B1Publication Date: 2006-04-11
- Inventor: David L. Bergeron , John M. Macaulay , Roger W. Barton , Jeffrey D. Morse
- Applicant: David L. Bergeron , John M. Macaulay , Roger W. Barton , Jeffrey D. Morse
- Applicant Address: US CA San Jose
- Assignee: Candescent Technologies Corporation
- Current Assignee: Candescent Technologies Corporation
- Current Assignee Address: US CA San Jose
- Main IPC: H01B13/00
- IPC: H01B13/00 ; C23F1/00

Abstract:
A method is provided for creating gated filament structures for a field emission display. A multi-layer structure is provided that includes a substrate, an insulating layer and a metal gate layer positioned on at least a portion of a top surface of the insulating layer. A plurality of patterned gates are also provided in order to define a plurality of gate apertures on the top surface of the insulating layer. A plurality of spacers are formed in the gate apertures at edges of the patterned gates on the top surface of the insulating layer. The spacers are used as masks for etching the insulating layer and forming a plurality of pores in the insulating layer. The pores are plated with a filament material that extends from the insulating pores, into the gate apertures, and creates a plurality of filaments. The spacers are then removed. The multi-layer structure can further include a conductivity layer on at least a portion of a top surface of the substrate.
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