发明授权
- 专利标题: Wafer packaging and singulation method
- 专利标题(中): 晶圆包装和切片方法
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申请号: US10776084申请日: 2004-02-11
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公开(公告)号: US07026189B2公开(公告)日: 2006-04-11
- 发明人: Chien-Hua Chen , Bradley C. John , Charlotte R. Lanig , Melissa A. Workman
- 申请人: Chien-Hua Chen , Bradley C. John , Charlotte R. Lanig , Melissa A. Workman
- 申请人地址: US TX Houston
- 专利权人: Hewlett-Packard Development Company, L.P.
- 当前专利权人: Hewlett-Packard Development Company, L.P.
- 当前专利权人地址: US TX Houston
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
A method for packaging and singulating a wafer having a plurality of micro devices includes providing a multi-lid substrate having a trench having intersection portions and non-intersection portions formed on a first side of the multi-lid substrate. The multi-lid substrate is coupled to the wafer such that the intersection portions of the trench pattern extend adjacent to at least three micro devices. Portions of the multi-lid substrate between a second side of the multi-lid substrate and the trench pattern are removed while the multi-lid substrate is coupled to the wafer.
公开/授权文献
- US20050176166A1 Wafer packaging and singulation method 公开/授权日:2005-08-11
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