发明授权
- 专利标题: Optical waveguide, forming material and making method
- 专利标题(中): 光波导,成形材料及制作方法
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申请号: US10620471申请日: 2003-07-17
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公开(公告)号: US07031591B2公开(公告)日: 2006-04-18
- 发明人: Kinya Kodama , Tsutomu Kashiwagi , Toshio Shiobara
- 申请人: Kinya Kodama , Tsutomu Kashiwagi , Toshio Shiobara
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, Maier & Neustadt, P.C.
- 优先权: JP2002-209388 20020718
- 主分类号: G02B6/10
- IPC分类号: G02B6/10 ; G02B6/00 ; G03C5/00
摘要:
An optical waveguide-forming material is comprised of a photocurable organopolysiloxane composition comprising an alkali-soluble organopolysiloxane and a photoacid generator, wherein the organopolysiloxane is obtained by (co)hydrolytic condensation of a triorganoxysilane having hydrolyzable epoxide and has an average molecular weight of 500–50,000 as determined by GPC using polystyrene standards. The optical waveguide-forming material, when subjected to pattern formation by photolithography, can be resolved with an alkaline aqueous solution, has a high sensitivity and resolution, and offers a cured film having improved light transmittance, heat resistance and humidity resistance.
公开/授权文献
- US20040017994A1 Optical waveguide, forming material and making method 公开/授权日:2004-01-29
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