Invention Grant
- Patent Title: High voltage transistor and method of manufacturing the same
- Patent Title (中): 高压晶体管及其制造方法
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Application No.: US10878273Application Date: 2004-06-28
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Publication No.: US07034360B2Publication Date: 2006-04-25
- Inventor: Yong Wook Kim , Dong Kee Lee , Hee Hyun Chang
- Applicant: Yong Wook Kim , Dong Kee Lee , Hee Hyun Chang
- Applicant Address: KR Kyungki-Do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Kyungki-Do
- Agency: Marshall, Gerstein & Borun LLP
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L21/336

Abstract:
Provided is a high voltage transistor in a flash memory device comprising: a source/drain junction of a DDD structure consisting of a high-concentration impurity region and a low-concentration impurity region surrounding the high-concentration impurity region, the high-concentration impurity region being formed in parallel with a gate electrode at a distance spaced by a location in which a contact hole is formed, and having a rectangular shape whose width is the same as or wider than that of the contact hole and whose length is the same as or narrower than that of an active region through which the gate electrode passes. Accordingly, a current density to pass the gate electrode neighboring the contact hole portion and a current density to pass the gate electrode at a portion where the contact hole cannot be formed become uniform. A uniform and constant saturation current can be obtained regardless of the number of the contact hole.
Public/Granted literature
- US20050104123A1 High voltage transistor Public/Granted day:2005-05-19
Information query
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