Invention Grant
- Patent Title: Scanning mechanism for high-speed high-resolution scanning
- Patent Title (中): 扫描机制用于高速高分辨率扫描
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Application No.: US10370472Application Date: 2003-02-24
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Publication No.: US07037012B2Publication Date: 2006-05-02
- Inventor: Jacob Karin , Amnon Shtein , Miki Retter , Amir Ziv-Av , Gilad Golan
- Applicant: Jacob Karin , Amnon Shtein , Miki Retter , Amir Ziv-Av , Gilad Golan
- Applicant Address: IL Beerot Yitzhak
- Assignee: Ziv-Av Engineering Ltd.
- Current Assignee: Ziv-Av Engineering Ltd.
- Current Assignee Address: IL Beerot Yitzhak
- Agent Mark M. Friedman
- Main IPC: B41J11/22
- IPC: B41J11/22

Abstract:
A scanning system for use in inspecting or writing on a substrate minimizes vibrations by applying movement-actuating forces directly between a carriage and a countermass which are both free to move along parallel tracks. Forces for decelerating and accelerating the scanning carriage are preferably applied along a minor part of a length of movement of the carriage. The carriage is then isolated from forces applied parallel to the track while moving along a major part of its length of movement. As a result, the carriage travels smoothly with approximately uniform speed during it's operative pass, without suffering from vibrations introduced by direct closed-loop feedback control.
Public/Granted literature
- US20040165923A1 Scanning mechanism for high-speed high-resolution scanning Public/Granted day:2004-08-26
Information query
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