发明授权
- 专利标题: CMOS image sensor and method for manufacturing the same
- 专利标题(中): CMOS图像传感器及其制造方法
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申请号: US10747196申请日: 2003-12-30
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公开(公告)号: US07037748B2公开(公告)日: 2006-05-02
- 发明人: Chang Hun Han
- 申请人: Chang Hun Han
- 申请人地址: KR Seoul
- 专利权人: Dongbuanam Semiconducor Inc.
- 当前专利权人: Dongbuanam Semiconducor Inc.
- 当前专利权人地址: KR Seoul
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: KR10-2003-0065730 20030923
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A CMOS image sensor and a manufacturing method thereof, wherein the gates of several transistors of the CMOS image sensor are formed in an active region defined by an isolation region for a unit pixel of the CMOS image sensor, and a passivation layer composed of insulating layer is formed on the semiconductor substrate. Impurities are ion-implanted into the active region to form one or more diffusion regions of a photo diode of the CMOS image sensor, wherein the passivation layer prevents a boundary portion of the active region from being ion-implanted. Thus, damages by ion implantation at the boundary portion between the diffusion region for the photo diode and the isolation region are prevented, and the dark current of the CMOS image sensor is reduced.
公开/授权文献
- US20050062084A1 CMOS image sensor and method for manufacturing the same 公开/授权日:2005-03-24
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