Invention Grant
- Patent Title: CMOS image sensor and method for manufacturing the same
- Patent Title (中): CMOS图像传感器及其制造方法
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Application No.: US10747196Application Date: 2003-12-30
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Publication No.: US07037748B2Publication Date: 2006-05-02
- Inventor: Chang Hun Han
- Applicant: Chang Hun Han
- Applicant Address: KR Seoul
- Assignee: Dongbuanam Semiconducor Inc.
- Current Assignee: Dongbuanam Semiconducor Inc.
- Current Assignee Address: KR Seoul
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: KR10-2003-0065730 20030923
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A CMOS image sensor and a manufacturing method thereof, wherein the gates of several transistors of the CMOS image sensor are formed in an active region defined by an isolation region for a unit pixel of the CMOS image sensor, and a passivation layer composed of insulating layer is formed on the semiconductor substrate. Impurities are ion-implanted into the active region to form one or more diffusion regions of a photo diode of the CMOS image sensor, wherein the passivation layer prevents a boundary portion of the active region from being ion-implanted. Thus, damages by ion implantation at the boundary portion between the diffusion region for the photo diode and the isolation region are prevented, and the dark current of the CMOS image sensor is reduced.
Public/Granted literature
- US20050062084A1 CMOS image sensor and method for manufacturing the same Public/Granted day:2005-03-24
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