Invention Grant
US07037782B2 Semiconductor memory having storage cells storing multiple bits and a method of manufacturing the same 失效
具有存储多个位的存储单元的半导体存储器及其制造方法

  • Patent Title: Semiconductor memory having storage cells storing multiple bits and a method of manufacturing the same
  • Patent Title (中): 具有存储多个位的存储单元的半导体存储器及其制造方法
  • Application No.: US10893500
    Application Date: 2004-07-19
  • Publication No.: US07037782B2
    Publication Date: 2006-05-02
  • Inventor: Takashi Miida
  • Applicant: Takashi Miida
  • Applicant Address: JP Kanagawa
  • Assignee: Innotech Corporation
  • Current Assignee: Innotech Corporation
  • Current Assignee Address: JP Kanagawa
  • Agency: Birch, Stewart, Kolasch & Birch, LLP
  • Priority: JP2001-336822 20011101; JP2002-303845 20021018
  • Main IPC: H01L21/336
  • IPC: H01L21/336
Semiconductor memory having storage cells storing multiple bits and a method of manufacturing the same
Abstract:
A multiple-bit cell transistor includes a P type silicon substrate, a gate insulation layer, a pair of N type source/drain regions, a pair of tunnel insulation layers, and a pair of floating gates. The silicon substrate is formed with a projection while the floating gates each are positioned on one of opposite side walls of the projection. Inter-polycrystalline insulation layers each are formed on one of the floating gates. A control gate faces the top of the projection via the gate insulation layer. An N type region is formed on each side of the projection and contacts the source/drain region adjoining it. The cell transistor lowers a required write voltage, broadens a current window, and enhances resistance to inter-band tunneling.
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