发明授权
- 专利标题: Method of forming semiconductor constructions
- 专利标题(中): 形成半导体结构的方法
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申请号: US11197151申请日: 2005-08-03
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公开(公告)号: US07037808B2公开(公告)日: 2006-05-02
- 发明人: Tongbi Jiang , Zhiping Yin
- 申请人: Tongbi Jiang , Zhiping Yin
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L21/322
- IPC分类号: H01L21/322
摘要:
The invention includes a semiconductor construction. The construction has a semiconductor material die with a front surface, a back surface in opposing relation to the front surface, and a thickness of less than 400 microns between the front and back surfaces. The construction also has circuitry associated with the die and over the front surface of the die, and a layer touching the back surface of the die. The layer can correspond to getter-inducing material and/or to a stress-inducing material. The layer can have a composition which includes silicon dioxide and/or silicon nitride. The composition can include one or more hydrogen isotopes, and the hydrogen isotopes can have a higher abundance of deuterium than the natural abundance of deuterium.
公开/授权文献
- US20050285256A1 Methods of forming semiconductor constructions 公开/授权日:2005-12-29
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