发明授权
- 专利标题： Tunable microresonator on an insulating beam deformable by the difference in thermal expansion coefficients
- 专利标题（中）： 可调谐的微谐振器可以通过热膨胀系数的差异而变形
-
申请号： US10814619申请日： 2004-03-31
-
公开(公告)号： US07038355B2公开(公告)日： 2006-05-02
- 发明人: Guillaume Bouche , Pascal Ancey , Grégory Caruyer
- 申请人： Guillaume Bouche , Pascal Ancey , Grégory Caruyer
- 申请人地址： FR Montrouge
- 专利权人： STMicroelectronics SA
- 当前专利权人： STMicroelectronics SA
- 当前专利权人地址： FR Montrouge
- 代理机构： Seed IP Law Group PLLC
- 代理商 Lisa K. Jorgenson; Robert Iannucci
- 优先权： FR0304147 20030403
- 主分类号： H02N2/00
- IPC分类号： H02N2/00 ; H01L41/00
摘要：
A device comprising a resonator formed of a piezoelectric layer sandwiched between two metal electrodes, the resonator being laid on a suspended beam, the device comprising means for deforming said beam by the difference in thermal expansion coefficients.