Invention Grant
- Patent Title: Tunable microresonator on an insulating beam deformable by the difference in thermal expansion coefficients
- Patent Title (中): 可调谐的微谐振器可以通过热膨胀系数的差异而变形
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Application No.: US10814619Application Date: 2004-03-31
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Publication No.: US07038355B2Publication Date: 2006-05-02
- Inventor: Guillaume Bouche , Pascal Ancey , Grégory Caruyer
- Applicant: Guillaume Bouche , Pascal Ancey , Grégory Caruyer
- Applicant Address: FR Montrouge
- Assignee: STMicroelectronics SA
- Current Assignee: STMicroelectronics SA
- Current Assignee Address: FR Montrouge
- Agency: Seed IP Law Group PLLC
- Agent Lisa K. Jorgenson; Robert Iannucci
- Priority: FR0304147 20030403
- Main IPC: H02N2/00
- IPC: H02N2/00 ; H01L41/00
Abstract:
A device comprising a resonator formed of a piezoelectric layer sandwiched between two metal electrodes, the resonator being laid on a suspended beam, the device comprising means for deforming said beam by the difference in thermal expansion coefficients.
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