发明授权
US07038442B2 Apparatus and method for detecting photon emissions from transistors
有权
用于检测晶体管的光子发射的装置和方法
- 专利标题: Apparatus and method for detecting photon emissions from transistors
- 专利标题(中): 用于检测晶体管的光子发射的装置和方法
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申请号: US11040333申请日: 2005-01-20
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公开(公告)号: US07038442B2公开(公告)日: 2006-05-02
- 发明人: Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
- 申请人: Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
- 申请人地址: US CA Milpitas
- 专利权人: Credence Systems Corporation
- 当前专利权人: Credence Systems Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Dorsey & Whitney LLP
- 主分类号: G01R31/302
- IPC分类号: G01R31/302
摘要:
A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.
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