Invention Grant
US07040032B2 Method and device for measuring whether a process kit part meets a prescribed tolerance
失效
用于测量处理套件部件是否满足规定公差的方法和装置
- Patent Title: Method and device for measuring whether a process kit part meets a prescribed tolerance
- Patent Title (中): 用于测量处理套件部件是否满足规定公差的方法和装置
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Application No.: US10806400Application Date: 2004-03-23
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Publication No.: US07040032B2Publication Date: 2006-05-09
- Inventor: Steven T. Fink
- Applicant: Steven T. Fink
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Main IPC: G01B3/50
- IPC: G01B3/50 ; G01B3/00
Abstract:
A go no-go gauge and method for verifying whether a process kit part used within a plasma chamber of a plasma processing tool has accumulated excessive wear or deposits. The gauge includes a component for verifying whether a dimension of a process kit part feature violates a prescribed size tolerance, the violation indicating that the process kit part has accumulated excessive wear or deposits.
Public/Granted literature
- US20050211004A1 Method and device for measuring whether a process kit part meets a prescribed tolerance Public/Granted day:2005-09-29
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