- 专利标题: Micromirror and post arrangements on substrates
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申请号: US10698563申请日: 2003-10-30
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公开(公告)号: US07042622B2公开(公告)日: 2006-05-09
- 发明人: Andrew Huibers , Satyadev Patel
- 申请人: Andrew Huibers , Satyadev Patel
- 申请人地址: US CA Sunnyvale
- 专利权人: Reflectivity, INC
- 当前专利权人: Reflectivity, INC
- 当前专利权人地址: US CA Sunnyvale
- 代理商 Gregory R. Muir
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.
公开/授权文献
- US20050094240A1 Micromirror and post arrangements on substrates 公开/授权日:2005-05-05