Invention Grant
US07045374B2 Method for manufacturing semiconductor optical amplifier having planar buried heterostructure
有权
具有平面掩埋异质结构的半导体光放大器的制造方法
- Patent Title: Method for manufacturing semiconductor optical amplifier having planar buried heterostructure
- Patent Title (中): 具有平面掩埋异质结构的半导体光放大器的制造方法
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Application No.: US10844321Application Date: 2004-05-13
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Publication No.: US07045374B2Publication Date: 2006-05-16
- Inventor: Dong Hun Lee , Eun Deok Sim , Ki Soo Kim , Moon Ho Park
- Applicant: Dong Hun Lee , Eun Deok Sim , Ki Soo Kim , Moon Ho Park
- Applicant Address: KR Daejeon-Shi
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon-Shi
- Agency: Mayer, Brown, Rowe & Maw LLP
- Priority: KR10-2003-0072957 20031020
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Provided is a method for manufacturing a planar buried semiconductor optical amplifier in which a spot size converter with a double-core structure is integrated, comprising the steps of: after growing a lower cladding layer, a lower waveguide layer and an upper cladding layer on a substrate, patterning a portion of thickness of the lower cladding layer, the lower waveguide layer and the upper cladding layer through an etching process using a dielectric layer pattern to form a lower waveguide; growing a planarization layer on the etched portions of the lower cladding layer, the lower waveguide layer and the upper cladding layer to smooth a surface; after removing the dielectric layer pattern, growing a space layer, an upper waveguide layer and a first cladding layer on the overall upper surface; patterning the first cladding layer, the upper waveguide layer and the space layer through the etching process using the dielectric layer pattern to form an upper waveguide having a horizontal taper area; after growing a first current blocking layer on the etched portions of the first cladding layer, the upper waveguide layer and the space layer of the upper waveguide, growing a second current blocking layer on the exposed portion of the first current block layer excluding the dielectric layer pattern; and after removing the dielectric layer pattern, forming a second cladding layer on the overall upper surface, and forming an electrode on the second cladding layer and the substrate, respectively.
Public/Granted literature
- US20050084991A1 Method for manufacturing semiconductor optical amplifier having planar buried heterostructure Public/Granted day:2005-04-21
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