发明授权
- 专利标题: Semiconductor device and corresponding fabrication method
- 专利标题(中): 半导体器件及相应的制造方法
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申请号: US10777207申请日: 2004-02-13
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公开(公告)号: US07045855B2公开(公告)日: 2006-05-16
- 发明人: Björn Fischer , Matthias Goldbach , Stefan Jakschik , Till Schlösser
- 申请人: Björn Fischer , Matthias Goldbach , Stefan Jakschik , Till Schlösser
- 申请人地址: DE Munich
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Munich
- 代理机构: Morrison & Foerster LLP
- 优先权: DE10306315 20030214
- 主分类号: H01L29/792
- IPC分类号: H01L29/792
摘要:
A semiconductor device having a gate structure, the gate structure having a first gate dielectric made of a first material having a first thickness and a first dielectric constant, which is situated directly above the channel region, and an overlying second gate dielectric made of a second material having a second thickness and a second dielectric constant, which is significantly greater than the first dielectric constant; and the first thickness of the first gate dielectric and the second thickness of the second gate dielectric being chosen such that the corresponding thickness of a gate structure with the first gate dielectric, to obtain the same threshold voltage, is at least of the same magnitude as a thickness equal to the sum of the first thickness and the second thickness. The invention also relates to a corresponding fabrication method.
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