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US07046415B2 Micro-mirrors with flexure springs 有权
微镜与弯曲弹簧

Micro-mirrors with flexure springs
摘要:
A micro-mirror device includes a micro-mirror and a flexure spring supporting the micro-mirror. The flexure spring is configured to store potential energy during movement of the micro-mirror that is released as kinetic energy to drive movement of the micro-mirror when the micro-mirror is re-oriented.
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