Invention Grant
- Patent Title: Mireau interference objective lens
- Patent Title (中): Mireau干涉物镜
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Application No.: US10886817Application Date: 2004-07-08
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Publication No.: US07054071B2Publication Date: 2006-05-30
- Inventor: Mark P. Davidson
- Applicant: Mark P. Davidson
- Applicant Address: US CA Palo Alto
- Assignee: Spectel Research Corporation
- Current Assignee: Spectel Research Corporation
- Current Assignee Address: US CA Palo Alto
- Agent Michael L. Sherrard
- Main IPC: G02B21/02
- IPC: G02B21/02
Abstract:
A Mireau interference microscope is corrected for spherical and other aberrations induced by the beamsplitter and mirror support windows by incorporating a cover glass correcting-objective lens. The support windows for the beamsplitter and mirror have a combined thickness within the adjustment range of the cover glass correcting-objective lens.
Public/Granted literature
- US20060007557A1 Mireau interference objective lens v3 Public/Granted day:2006-01-12
Information query
